high performance production lines for crystalline solar...

SINGULUS

TECHNOLOGIES

February 2016

IV German-Brazilian Renewable Energy Business Conference

Photovoltaics in Rio de Janeiro and Northeastern Brazil

Rio de Janeiro – 29th of February 2016Thomas Künzl

Director Sales & Marketing

High Performance Production Lines for Crystalline Solar Cells

SINGULUS Technologies AGThomas Kuenzl – Director Sales & Markerting

SINGULUS TECHNOLOGIES AG

October 2016 - 2 -

The Green Expo 2016, WTC Mexico City

SINGULUS - Innovations for New TechnologiesState-of-The-Art Equipment Supplier in combination with market orientated Technology Know-How

I. Corporate Profile

II. PV Technology Overview and Market Informations

III. Selection Criteria‘s and Impacts

i. Solar Cell Concept

ii. Production Lines

IV. PV Value Chain

V. Solar Cell Production Lines

i. Standard Line Overview with Key Equipment

ii. PERC Solar Cell Production Lines

iii. Cell Efficiency

iv. Improved Cell Features


October 2016 - 3 -








IV. PV Value Chain




iii. Cell Type and Efficiency



October 2016 - 4 -


Cooperated Headquarter

Kahl/Main - Germany

Research & Development

Consulting

Engineering & Design

Project Management

Production

Installation

Commissioning

Service/Maintenance

Hotline24/7

Training

Optical Disc PhotovoltaicSemiconductor

Corporate Profile



October 2016 - 5 -


Corporate Profile

SINGULUS - Innovations for New TechnologiesWorldwide Connected, Close to the Markets, Close to the Customer Base

SINGULUS Technologies AG

Headquarter Kahl am Main, Germany


Branch FFBFürstenfeldbruck (near Munich), Germany

Singulus Inc.Headquarter US, Hartford

Singulus Inc.Sales and Service West Coast

Singulus Latin AmericaSales and Service South America

Semiconductor

over 180

systems installed

Photovoltaic

over 4.000 MW

production capacity

installed

Optical Disc

over 8550

systems installed *

* including Metallizer


October 2016 - 6 -


Corporate Profile

SINGULUS - Innovations for New TechnologiesHistory Milestones – Successful and Innovative over Decades

Foundation

SINGULUS Technologies

1995 1996 1997 2002 2007 2010 2011 2012 2013 2014 2015

IPO

Optical Disc

Business

Semiconductor

Business

Opening

CIGS Pilotline

(PTIP)

Singulus enter

Photovoltaik

Business

SINGULAR

Market LaunchICP PECVD System

SOLARE

Market LaunchCrystalline Turn Key Lines

Acquisition

STANGL Semiconductor Equipment AG

Experience since 1995 in SOLAR Equipment

TENUIS Gen 2

Market IntroductionCIGS Buffer Layer System

Start

New Business

Fields

SILEX II

Market Launchc-Si Batch System

EVAPOR

Market Launch

Co-Evaporation System

VISTARIS

Market LaunchPVD Sputter System

PERC

Market LaunchPERC Upgrade

Major Order

SILEX II1 GW HJT Project


October 2016 - 7 -








IV. PV Value Chain







October 2016 - 8 -


CdTe Thin Film Solar Cells

Wet Process Applications

Horizontal- and Vertical PVD Sputter

Systems

CdTe = Lowest Production Cost (Wp)

Crystalline Solar Cells (Multi/Mono)

SOLARE c-Si Turn Key Solution

Batch- and Inline Wet Processing

AR and ITO/ Ag Deposition (HJT)

c-Si = Highest Efficiency

CIGS Thin Film Solar Cells

Selenization and Sulphurisation Systems

Horizontal- and Vertical PVD Sputter Systems

Wet Process Applications

Evaporation System

CIGS = Highest Performance Potential

PV Technology Overview

Comparison of the dominant Photovoltaik Technologies

c-Si are leading Photovoltaic Technology referencing to installed production capacity


October 2016 - 9 -


Market Informations/Overview

Worldwide Market Shares for different Cell Technologies

Market Shares predicts a mainstream for double sided contact cell concepts

Source of Figure


October 2016 - 10 -



Average stabilized efficiency values for Si solar cells

Average efficiencies on State-of-the-art mass production lines, with major potential to improve performance

Source of Figure


October 2016 - 11 -



Average module power on 60 cell module technology

Average module power State-of-the-art mass production lines, with major trend to module output

Source of Figure


October 2016 - 12 -








IV. PV Value Chain







October 2016 - 13 -


Selection Criteria for Solar Cell ConceptThe State-Of-The-Art mass production with Production Lines for Standard- and High Efficiency Cells

Cell concept should be compatible with Multi-PERC processing

Trade-off between efficiency increase and

o Higher CAPEX

o Higher OPEX

o Lower yield

Our philosophy

o Production line for multi-crystalline cells suitable for PERC and Bifacial cells

N-type wafers are so expensive that a real high-efficiency, technology should be

chosen for:

o HIT or IBC

PERL and PERT cell concepts require additional CAPEX and OPEX (higher silver

paste consumption) which are not justified by efficiency increase

Conclusion

PERC/Bifacial Production

line for Multi wafers


October 2016 - 14 -


Globally competitive quality

Lowest production cost

Highest cell efficiency / module power

Product differentiation compared to standard

modules

High-potential / Low risk technology selection

o No fancy promises that do not work in practice

o Many small steps are better than 1 big risky step

Lowest material consumption

Small foot print

Best price/performance ratio

Reduced man-power per throughput

High

Throughput

High

Uptime

Low

Breakage

Selection Criteria for Solar Cell Production LineThe State-Of-The-Art mass production with Production Lines for Standard- and High Efficiency Cells


October 2016 - 15 -








IV. PV Value Chain







October 2016 - 16 -


The PV Value ChainThe State-Of-The-Art mass production with Production Lines for Standard- and High Efficiency Cells

Source of Figure : NREL

Ingotting

Si melted /

solidified to

Si block (Ingot)

Wafering

Silicon to solar

wafers

Solar Cell

Wafer to solar

cell

Module

Cell to module

Silicon

Sand to

metallurgical

silicon


October 2016 - 17 -


Wafer Stack

Splitting

Loading and

Inspection

Saw Damage

Etch (SDE)

Texturing

Junction

Formation

Phosphorous

Silicate Glass

Removal /

Edge Isolation

(EE)

Anti-Reflection

Coating and

Passivation

(PECVD)

Printing /

Firing

Front- /

Backside

Contact

Testing /

Sorting

Wafer

(Multi/Mono)

Solar Cell


October 2016 - 18 -








IV. PV Value Chain







October 2016 - 19 -


Photovoltaic Production Line

Standard Line Overview with Key Equipment Focus

SINGULUS Product Placement at Al-BSF and PERC Cell Line as Turn-Key Solution SOLARE

SOLARE Mono Line SOLARE Multi Line


October 2016 - 20 -


Depending on wafer material

SILEX or LINEXLINEX PSG EE SINGULAR XP

Wafer Stack

Splitting

Loading and

Inspection

Surface

Treatment

SDE/Texturing

Wet processing

Junction

Formation

Diffusion

Thermal

Process

PSG Removal /

Edge Isolation

(EE)

Removal

Wet Processing

Anti-Reflection

Coating and

Passivation

PECVD

Deposition

Process

Printing /

Firing

Front- /

Backside

Contact

Testing /

Sorting




SILEX Batch Processing of MONO Crystalline Solar Cells

LINEX Inline Processing of MULTI Crystalline Solar Cells

SOLARE with BATCH System SIELX SOLARE with INLINE System LINEX


October 2016 - 21 -


Multi Crystalline

(MC) Wafer

LINEX

Standard and advanced production methods for multi crystalline

solar cells

Main Features

One InLine Platform for all processes with

optimized process parameter

Throughput up to 7200 wph (appr. 200 MW)

Lowest CoO (e.g. DI Water Recycling)

Wafer Transport system with no mechanical

contact on the top-side

Shadow free contact of the wafer surfaces

with the process media

Multi Crystalline

Acidic Texture


Standard Line Overview with Key Equipment Focus « Wet Process »

Inline Wet Processing for TEXTURING of Multi Crystalline Solar Cells


October 2016 - 22 -


SILEX II

Standard and advanced production methods for mono crystalline

solar cells


Standard Line Overview with Key Equipment Focus « Wet Process »

Batch Wet Processing for SAW DAMAGE REMOVAL and TEXTURING of Mono Crystalline Solar Cells

Mono Crystalline

(CZ) Wafer

Mono Crystalline

Saw Damage and

Alkaline Texture

Main Features

Versatile batch tool platform for wet processes

in clean technology

Standard line configuration with IPA free

texturing and state-of-the-art process

High throughput performance up to 5,600 wph

Low breakage rate down to 0.01 %

Wafer thickness down to 110 μm (post process)


October 2016 - 23 -






October 2016 - 24 -


Ground floor First Floor

The layout is executed on a

90 MW example line:

efficient production flow with

one line execution (90x40m)

ideal connection to utility

expanding in the future

standard concept



Example Layout of an 90 MW standard line for Al-BSF Solar Cells

90 MW calculations:

Cells : 2800 wph (gross)

Modules : 46 mph (60 cells)


October 2016 - 25 -



High Efficience Solar Cell Production of PERC Cell Concept

Difference between Standard Al-BSF (Back Surface Cell) and PERC Solar Cell Concept

The PERC (passivated emitter rear cell)

prevents electrons being captured by

the rear surface, resulting in increased

cell current voltage / higher efficiency

The Aluminum oxide (AIOx) passivation

with a silicon nitrate capping layer stops

electrons to be captured and give a

“second chance”


October 2016 - 26 -


The cell power increasing technology

PERC perfectly balances manufacturing

costs and efficiency.

Actual PERC results show performance

of up to 21.2% (confirmed by ISE

CalLab).





October 2016 - 27 -


Wafer Stack

Splitting

Loading and

Inspection

SDE

Texturing

Junction

Formation

Phosphorous

Silicate Glass

Removal /

Edge Isolation

(EE)

Anti-Reflection

Coating and

Front

Passivation

(PECVD)

Printing /

Firing

Front- /

Backside

Contact

Testing /

Sorting

LCO

Laser Contact

Opening

Rear side

passivation

AlOx and SiNx

Single Side

Polish

Wet Chemical

Step

Upgrade of Standard Production Lines for PERC Cells (Passivated

Emitter and Rear Cells) with three additional process steps

LINEX SSE SINGULAR XP



SINGULUS Product Placement at PERC Cell Line as Turn-Key Solution SOLARE


October 2016 - 28 -


Ground floor First Floor

The layout is executed on a

90 MW example line:

efficient production flow

ideal connection to utility

expanding in the future

standard concept

PERC cell concept



Example Layout of an 90 MW standard line for PERC Solar Cells

90 MW calculations:

Cells : 2800 wph (gross)

Modules : 46 mph (60 cells)


October 2016 - 29 -




Example Layout of an 220 MW standard line for PERC Solar Cells with integrated Module Line

220 MW calculations: Cells 6800 wph (gross) | Modules 114 mph (60 cells)


October 2016 - 30 -


nStandard

Al-BSF PERC Bifacial *

Efficiency

Standard

Efficiency

PERC

Efficiency

Bifacial *

Multi p-Type X X X 17.8 – 18.2 % 18.2 – 19.6 % 20.4 %

Mono p-Type X X X 18.9 – 19.2 % 19.3 – 19.8 % 21.5 %

Mono n-Type X N/A N/A 22.0 %

SINGULUS SOLARE Production Line is flexible to run Standard,

PERC (and Bifacial)

No additional hardware investment for Bifacial required

* Market introduction Q4/2016


Guaranteed Solar Cell Efficiency on Production Lines

Guaranteed Efficiencies (Cell) on Standard Solar Cell Production Lines by SINGULUS


October 2016 - 31 -



Improved Cell Features on SINGULUS Production Lines

Guaranteed and approved Cell Features on Standard Solar Cell Production Lines by SINGULUS

0.98

0.99

1.00

1.01

1.02

0 1 2

No

rma

lize

d d

ata

weeks

IV data module 1

Ncell

Uoc

Isc

FF

LID – Light Induced Degradation:

PID – Potential Induced Degradation:

TID – Time Induced Degradation:

Reduces minority carrier lifetime

Caused by increased recombination at complexes

under illumination

Effect is restricted to p-type (Br doped) cell concepts

Degrades power of solar modules ≥50 %

Caused by potential driven diffusion of Na+ into ARC, causing

shunting effects

Increased humidity accelerates PID

Observation of significant efficiency losses of PERC

due to storage of cells under room conditions („on the desk”)

after a few days only. 1.00 0.99

0.0

0.2

0.4

0.6

0.8

1.0

1.2

initial re-measured

η

[a.u

.] /

Js

c[a

.u.]

Both Efficiency + Jsc (normalized)


October 2016 - 32 -

The Green Expo 2016, WTC Mexico CityContact

Q & AQuestions & Answers


Headquarter - Kahl am Main, Germany

Thomas Künzl

Director Sales & Marketing

[email protected]

Mobile +49 176 203 503 66

Office +49 6188 440 233


http://www.singulus.de


October 2016 - 33 -



Hanauer Landstrasse 103

D-63796 Kahl/Main

Dr.-Ing. Stefan Rinck, President and CEO

Tel: +49-6188-440-109

[email protected]

Markus Ehret, CFO

Tel: [email protected]

Maren Schuster, Head of Investor Relations

Tel: +49-6188-440-612

[email protected]

Bernhard Krause, Communications Worldwide

Tel: +49-6181-9828020

[email protected]

Forward-Looking Statements

This presentation contains forward-looking statements

based on current expectations, assumptions and forecasts

of the executive board and on currently available

information. Various known and unknown risks,

unpredictable developments, changes in the economic and

political environment and other presently not yet

identifiable effects could result in the fact that the actual

future results, financial situation or the outlook for the

company differ from the estimates given here. We are not

obligated to update the forward-looking statements made in

this presentation unless there is a legal obligation.

high performance production lines for crystalline solar...

Documents