hilco indial available immediately€¦ · 2 – kla-tencor model 5200xp 200mm wafer inspection...
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A Hilco Global CompanyVested in Your Success
31555 West Fourteen Mile Road, Suite 301Farmington Hills, Michigan 48334 USAPh +1 248-254-9999 • Fx +1 248-254-9995
www.hilcoind.com
By Order of
AVAILABLE IMMEDIATELYHilco® Industrial
To schedule an auction, please call Hilco Industrial at 1-877-37-HILCO (44526)2
Hilco® Industrial
asset locations
ni 49-2, YAcHiMAtAni YAcHiMAtA-SHi, cHiBA 289-1103JAPAn
1108-1, HiSHidA SHiBAYAMA-MAcHi SABU-gUn,cHiBA 289-1602 JAPAn
For more inFormation orinspection, please contactBRiAn Lee +1 [email protected]
RoBeRt LUPARdo +1 [email protected]
300mm Tools1 – DNS ELECTRONICS MODEL LA-3000F 300MM FLASH LAMP
ANNEALER, S/N ZE51620100 (2006)
1 – TEL MODEL FORMULA 1S-H 300MM DIFFUSION FURNACE,S/N P0000485090 (2005)
1 – EBARA MODEL FREX 300E 300MM TUNGSTEN CMP SYSTEM,S/N PZB51229WX (2005)
1 – EBARA MODEL EAC300BI-T 300MM BEVEL POLISHER, S/N SBB4012WX (2005)
1 – KLA MODEL OMNIMAP RS-100C 300MM RESISTIVITY MEASUREMENT SYSTEM, S/N 10064392 (2006)
1 – RIGAKU MODEL WAFER X-300 300MM X-RAY FLUORESCENCEANALYSIS TOOL SYSTEM, S/N BR71011 (2005)
AVAILABLE IMMEDIATELY
For more information, please visit us on the web at www.hilcoind.com 3
300MM TOOLS • 200MM ETCHERS, FURNACES & CLEANING MACHINES
200mm eTchers2 – TOKYO OUKA KAGAKU MODEL TCE-2802 BP ETCHERS, S/Ns
T-9607438, T-9607439, (2) Main Chambers, Rorze RR304L90-514-001 Robot, Lambda PS-1103 UPS, Edwards IQDP80 Pump, EdwardsQMB500 Pump, and Kyosan RFK10ZF RF Generator
1 – TOKYO ELECTRON MODEL TE-8500S ETCHER, S/N K85632(1996), SMC Chiller Model INR-431-54E, Lambda UPS Model PS1205, Edwards Pump Model STP-H600C2, Edwards Pump ModeliQDP80
2 – TOKYO ELECTRON KYUSYU LTD MODEL CLEAN TRACK MARK8ETCHERS, S/Ns MD-826912, MD-826911 (Both 1996)
3 – TOKYO ELECTRON KYUSYU LTD MODEL UNITY 2E-855LL ETCHERS,S/Ns U00617, U00618, U00919 (To 1999)
1 – TOKYO ELECTRON MODEL UNITY2E-855DD DRM ETCHER, S/NU01391 (2000), Software Version: 2.91-REV213-NIT-4.00b, (4)Edwards Vacuum Pump Systems
8 – TOKYO ELECTRON MODEL TE-8500S ETCHERS, S/Ns K85631,K85677, K85634, K85755, K85678, K85633, K85681, K85680 (All1996), SMC Chiller Model INR-431-54E, Lambda UPS Model PS1205, Edwards Pump Model STP-H600C2, Edwards Pump ModeliQDP80
200mm Furnaces2 – KOKUSAI MODEL DJ-853V LPCVD-POLY FURNACES,
S/Ns T2DC1-10673-6, T2DC1-10674-2, CX3000Controller, 8" Wafer Size, Heater 200V 225A, Controller100V 30A, Clean Unit 200V 30A
2 – KOKUSAI MODEL DJ-853V DIFFUSION FURNACES,S/Ns T1DC3-00054-2, T2DC1-10673-7, 8" Wafer Size,Loading System, Furnace System, Gas Control System,Pressure Control System, Burning System, and PumpStatus Unit has Controller Version CX3000
4 – KOKUSAI MODEL DD853V FURNACES, S/Ns T2DD1-15294-2, T2DD3-15795-1, T2DD1-15295-1,T2DC1-10673-51, 8" Wafer Size, H2 Annealing, LoadingSystem, Furnace System, Gas Control System, PressureControl System, and Burning System, Controller isCX3000, Clean Unit 200V/10A
4 – TOKYO ELECTRON MODEL ALPHA-808SDN (8S) FUR-NACES, S/Ns 300009665157, 300009675159,300009675226, 300009675227 (All 1996), Furnace Unit,Pump, Utility Box, Valve Box, Heater Chamber, O2Analyzer
5 – TOKYO ELECTRON TOHOKU LTD. MODEL ALPHA-808SC (8S) FURNACES, S/Ns 300009685224,300009685225, 300009685151, 300009685150,300009775407 (To 1997), Furnace Unit, Pump, Utility Box,Valve Box, Heater Chamber, O2 Analyzer
1 – TOKYO ELECTRON MODEL ALPHA-8SE-Z FURNACE,S/N M00000175461 (2001), Software Version 3.10 R0003
200mm cleaning machines2 – MARUWA MODEL HF1-200-3FV-1C 200MM CLEANING
MACHINES, S/Ns 96E-55004, 96E-55004B (1996)
2 – MARUWA MODEL PCS-1700 200MM CLEANINGMACHINES, S/Ns 96E-55008A, 96E-55008B (Both1996), Clean System and Quartz Tube/Plate System
1 – MARUWA MODEL PCS-2100S-OC 200MM CLEANINGMACHINE, S/N 96E-55009 (1996), Clean System andDIW System
4 – MARUWA MODEL AQW-200-1FV-0C WET TUBECLEANING MACHINE, S/N 96E-55006-D, 96E-55006A-C,96E-55006B, 96E-55006-C (All 1996)
Partial Listing Only, Please Visit Our Website
www.hilcoind.comFor Complete Lot Catalog
200MM ION IMPLANTERS, STEPPER SYSTEMS & MISCELLANEOUS TOOLS
To schedule an auction, please call Hilco Industrial at 1-877-37-HILCO (44526)4
200mm ion implanTer sysTems4 – VARIAN MODEL E220 ION IMPLANTER SYSTEMS,
S/Ns 37326, ES193554, 37338, ES193614 (To 2000)
2 – SEN MODEL NV-GSD-HE HIGH ENERGY ION IMPLANTERS,S/Ns SS9H6600, S96H3500 (To 1999), Wafer Size: 8", InjectorModule, Disk Module, Source Module, End Station Module,Linac Module, Facility, FEM Module, Q Lens Power Supply, (3)Dry Pumps, Cryo Compressor, Main Chiller, Cryo PumpExchange Tool, Control Console, Source Isolation Transformer
3 – SEN MODEL NV-GSD III-LE HIGH CURRENT IONIMPLANTERS, S/Ns SS9B4900, SS9D9400, SS9B3600 (All1999), Wafer Size 8", Beam Module, Disk Module, SourceModule, End Station Module, D.I. Water Unit, (2) Dry Pumps,Cryo Compressor, Main Chiller, Plasma Shower Control Unit,Isolation Transformer, Load Lock Controller, AMU Controller
200mm sTepper sysTems2 – NIKON MODEL 4425I 200MM STEPPER SYSTEMS,
S/Ns 1107078, 1107098 (Both 1996), (x2.5), 2.5:1 Reduction,Reticle Size 6", with Software Computer Type Vax Station 400096, Dual Chamber Type S11, Chamber Temp 23
5 – NIKON MODEL NSR-2205EX14C 200MM STEPPERS, S/Ns 7573012, 7573104, 7573092, 7573023, 7277008 (To 1999), 6" Reticle Size, Field Size 22 x 22mm, Reduction5:1, Wafer Size 8", 208V, 3 Phase, 50Hz, Computer TypeDMCC, Laser Type: Cymer ELS5400, Exposure Wavelength:KRF 248.4nm
3 – NIKON MODEL NSR2205: 14E2 200MM STEPPERS, S/Ns1409124, 1409133, 1409136 (To 1996), Step and RepeatSystem, Resolution 0.35um, 6" Reticle Size, 200mm WaferSize, 1/5 Reduction, 22 x 22mm Step Pitch
1 – NIKON MODEL NSR2205EX12B 200MM STEPPER, S/N7270029 (1997), 6" Reticle Size, Field Size 22 x 22mm,Reduction 5:1, Wafer Size 8", 208V, 3 Phase, 50Hz, ComputerType Vax Station 4000 96, Laser Type: Cymer ELS5400,Exposure Wavelength: KRF 248.4nm, with Projection andIllumination Optical System, and with Dual NEMA Box TypeChamber Model EXA-4
miscellaneous 200mm Tools3 – CANON MODEL ANELVA L-1060 SVII PLUS-1
SPUTTERING SYSTEMS, S/N EVP-29986, EVP-29987,EVP-29989 (All 1996), Main Unit, UPS, (2) EdwardsPumps Model iQdP80 (3) Cryo Compressors Model CRC874, Power Rack, Operation Rack
4 – NOVELLUS MODEL PEP IRIDIA 200MM ASHERMACHINES, S/Ns M860880, M86130, M86131, M860770(To 2002), 208VAC, 50 Hz, 50A, 3 Phase, Yaskawa XU-RCM4700 Rev.3 Robot, Yaskawa XU-CM4700 Robot,(2) Edwards iQDP80 Vacuum Pump Systems and (2)Edwards QMB500 Vacuum Pump Systems
3 – TOKYO ELECTRON KYUSYU LTD MODEL CLEANTRACK ACT 8 KRF DEVELOPER AND COATERS, S/NsMD-9290744, MD-9280243, MD-9290678 (To 1999),Software Version 1.18.003
2 – TOKYO ELECTRON MODEL CLEAN TRACK MARK 8ILINE DEVELOPER AND COATERS, S/Ns MD-826803,MD-8271210 (To 1997), Software Version MK80723
2 – TOKYO ELECTRON MODEL MB2-730 CVD SYSTEMS,S/Ns MCJ-116, MCJ-132 (Both 1997), MB2 Main System,(5) Ebara Dry Pumps, Power Rack, Power Distribution,Chiller, (2) User Interface Racks
4 – WATKINS-JOHNSON MODEL WJ-1000 APCVD SYSTEMS,S/Ns 5712, 5818, 5753, 5761 (To 2000)
1 – MODEL PEAV900E METAL EVAPORATOR (2012), MainUnit, Edwards Pump Model IQDP80, Helix TechnologyCryo Compressor Model CTI9600, Telemark Power SupplyUnit Model TT-10, Cheng Ten Electric Transformer ModelDry Type, Telemark Desposition Controller Model MDC360
1 – RUDOLPH INSTRUMENTS MODEL F3/D FOCUS ELLIPSOMETER MACHINE, S/N 10740 (1996), 2D/3DMapping, Laser: 6328A Wavelength HeNe Laser withRotating Compensator Measure Method, SoftwareOperating System OS2
4 – MARUWA 200MM DRYERS, Model QSR-1500S-4V-1CS/Ns 96E-55007A, 96E-55007B, Model QSR-2000W-2CS/N 96E-55005A, 96E-55005B (All 1996)
2 – NEC MODEL SL473 200MM WAFER LASER MARKINGMACHINES, S/N 0044 (2003), with C4000 Double ArmAxis, Touch Screen Controller; S/N 0531 (1999), withC4000 Rorze Robot
1 – NIKON MODEL 9VA STAGE SYSTEM, 9'VA
ATE • TEST & MEASUREMENT • WAFER INSPECTION & HANDLERS
For more information, please visit us on the web at www.hilcoind.com 5
auTomaTed TesT equipmenT (aTe)3 – LTX FUSION MX TESTERS, MODELS MX-40 AND MX-20
1 – TERADYNE MODEL EAGLE ETS600 ETS TEST SYSTEM
5 – TERADYNE MODEL ULTRAFLEX SEMICONDUCTOR TEST SYSTEMS
13 – TERADYNE TESTERS: (2) GEN 3 RF, (5) VHFAC, (5) GEN 4, (1) GEN 5
1 – 1 TOKYO ELECTRONICS MODEL ESPIER-1000 CDM TESTER
1 – 1 TOKYO ELECTRONICS MODEL 8612 LATCH UP TESTER, S/N 1014(1994), 8612-2 ESD Pulse Generator
TesT and measuremenT1 – YOKOGAWA MODEL 3087-21 TEMPERATURE RECORDER, S/N 45RA1073
(1985)
2 – TEKTRONIX 350MHZ OSCILLOSCOPES, Model 2465A, S/N 302789 (1987),Model TDS644A, S/N B010688
1 – KEYENCE MODEL IT2-50 IR METER, S/N M521188 (1996)
2 – AGILENT MODEL 4145B SEMICONDUCTOR PARAMETER ANALYZERS,S/Ns 2830J01697, 2830J01517 (To 1989)
1 – KUWANO MODEL DV-810 DIGITAL MULTIMETER, S/N 4A38 (1985)
1 – HEWLETT PACKARD / AGILENT MODEL HP4062UX SEMICONDUCTORPARAMETER IC TESTER ANALYZER, S/N 2848J00656 (1996)
1 – ADVANTEST MODEL TR6120A PROGRAMMABLE DC STANDARD POWERDISTRIBUTION UNIT, S/N 92840113 (1990), 1-1000V, 1-100mA
1 – ADVANTEST MODEL TR6878 DIGITAL MULTI METER, S/N 93830049 (1990)
1 – AGILENT MODEL 4145A SEMICONDUCTOR PARAMETER ANALYZER, S/N2422J01882
1 – HEWLETT PACKARD / AGILENT MODEL 16500A LOGIC ANALYZER, S/N 2650J00576 (1988)
2 – WAVETEK MODEL 859 PULSE GENERATORS, S/Ns BJ93114572,BG92030702 (To 1998)
1 – SONY MODEL LT100 DIGITAL GAUGING MULTI AXIS UNIT, S/N 100179
1 – PROSTAT MODEL PSK-310 ESD SYSTEM
1 – KLA-TENCOR MODEL FLX-5200 AUTOMATED THIN FILMS MEASUREMENTSYSTEM, S/N 4189 (1992)
WaFer inspecTion and handlers1 – JEOL MODEL JDLM-6601E DIGITAL SCANNING LASER MICROSCOPE,
S/N LS160009-1 (1999), Mainframe, Monitor, System Controller Kit with Table 1 – HITACHI MODEL S-8820 SCANNING ELECTRON MICROSCOPE, S/N 8338-08 (1996),
Main Body, (2) Dry Pumps, Control Unit, Power Supply Unit1 – KLA-TENCOR MODEL EV-300 200MM SCANNING ELECTRON MICROSCOPE,
S/N eV37IQC823021 (2002), Main Unit, Power Rack, Console, (2) Pumps, Power Supply1 – OLYMPUS MODEL BH2-UMA OPTICAL INSPECTION MICROSCOPE, S/N 31471 (1988),
with Nikon NEO SPlan Objectives: 10x, 20x, 50x, 100x and (1) Nikon Neo DPlan 150xObjective Scope, Olympus TGH Power Supply Transformer
2 – OLYMPUS MODEL AL-2100 200MM WAFER INSPECTION SYSTEMS, S/Ns 310002, 106045(To 2003), with Sony CCD Camera, Ranges: 1.5x, 2.10x, 3.20x, 4.50x, 5.10x all BD Type
1 – HITACHI MODEL IS-2500 ASSET WAFER INSPECTION SYSTEM INSPECTIONMACHINE, S/N 972326
2 – KLA-TENCOR MODEL 5200XP 200MM WAFER INSPECTION SYSTEMS, S/Ns 2202,2092 (To 1999)
1 – KLA-TENCOR MODEL VIPER KLA2410 200MM AUTOMATED MACRO-DEFECTWAFER INSPECTION SYSTEM, S/N V24010774 (2000)
1 – RUDOLPH INSTRUMENTS MODEL F3/D FOCUS ELLIPSOMETER MACHINE, S/N10745 (1996), 2D/3D Mapping, Laser: 6328A Wavelength HeNe Laser with RotatingCompensator Measure Method
5 – ASYST MODEL DP4200SI AUTO HANDLER LOADERS, S/Ns 1001191A10-046,1001191A10-048, 1001191A10-047, 1001191A10-049, 1001191A10-045 (All 2000), O/CProtect, Miezoh OCR Reader, 8" Open Cassette x 4 Load Port, PRI – Robot Maker
1 – TECHNOS CO. LTD. MODEL SMAT200 X-RAY MICROANALYZER, S/N 132R-048 (2000)
1 – SUMITOMO PRECISION MODEL KC-200A CARRIER CLEANER, S/N 00005328-000(1999), NEC PC Model PC9821xb10/JB, Monitor, PC Rack
1 – TOKYO SEIMITSU MODEL A-PM-90A HP3 FULL AUTO PROBER SYSTEM,S/N F01006BL (1996)
2 – FUJITSU MODEL MITR-2K CARRIER EXCHANGER UNITS, S/Ns 9608004, 9608002(Both 1999)
5 – FUJITSU MODEL EITR CARRIEREXCHANGER UNITS, S/Ns 8008-100,047s-050, N/A (To 2001)
1 – METRICON MODEL PC-2010 PRISMCOUPLER, S/N 22270 (1996)
1 – CANON MODEL AWEX-258W (441)WAFER REVERSER UNIT, S/N 90-19-9048 (2002)
1 – KLA-TENCOR MODEL P-20H LONGSCAN PROFILER, S/N 7960188 (1996)
1 – KLA-TENCOR MODEL SFS-6420 SURFACEPARTICLE COUNTER, S/N 0696-295 (1996)
MISCELLANEOUS SUPPORT EQUIPMENT
To schedule an auction, please call Hilco Industrial at 1-877-37-HILCO (44526)6
miscellaneous supporT equipmenT5 – APPLIED MATERIALS MODEL MIRRA3400-AS2000 200MM WAFER POLISHERS,
S/N 401805, 401804, 404140, 404294, N/A (All 2003), Main Unit Model Mirra3400,Main Unit Model AS2000, FABS, LTA, FABS PDU Rack, System Controller, Back-SideRack, Cassette Tank, Soft Supply Unit, DHF Supply Unit, DIW Booster
1 – APPLIED MATERIALS MODEL MIRRA3400 200MM POLISHER, S/N L447 (1999),Main Unit, System Controller, DIW Booster, (2) Monitor Racks, Cassette Tank,Induction Motor, UPS Module
3 – DNS ELECTRONICS MODEL AS2000 200MM STANDALONE POST CMP CLEANERS,S/Ns 59530-5177, 57530-5058, 59530-5176 (To 1999), Main Body, Underwater LoaderUnit, Unloader Unit, Master Controller, Drain Pan with Leak Sensor
3 – DNS ELECTRONICS 200MM WAFER CLEANING MACHINES, Model FC 821-L S/Ns60630-2689, 59630-2615 Model WS-820L 200MM S/N 59520-2775 (To 2001)
1 – BUEHLER MODEL ECOMET6 GRINDER POLISHER, S/N 513-E6G-318 (1995)
1 – LOGITECH MODEL 1PM52 LAPPING AND POLISHING MACHINE, S/N 60-07-99(1999), Digital Display Controller
1 – ESPEC MODEL TPC-412M PRESSURE – TEMPERATURE AND HUMIDITY CHAMBERSYSTEM, S/N 40042 (1991), Balanced Press – Temperature and Humidity Control, 50/60Hz, Temp Range 105 – 162.2° C, 75 – 100% RH, 4.0kg, Inside Dimensions 29.5 XL 30 cm
1 – ESPEC MODEL SH-240 TEMPERATURE AND HUMIDITY CHAMBER HUMIDIFIER,S/N 91002529 (1995), Balanced Temperature and Humidity Control, AC 100V, 50/60Hz, Max. 15A, Temp Range 40 – 130° C, 30 – 95% RH, Heater 0.5kw, Humidity Heater0.4 kw, Refrigerator 0.35kw 4.0kg, Inside Dimensions W 30 X H 30 X D 24 cm, OutsideDimensions W 44 X H 89 X D 74cm, Weight 80kg
2 – ESPEC MODEL STH-120 FORCED CIRCULATION & VENTILATION SYSTEMS,S/Ns 80001273, 80001274 (Both 1995), Balanced Temperature and Humidity Control,Temp Range 20 – 300° C, Heater, Inside Dimensions W 36 X H 24 X D 33 cm, OutsideDimensions W 48 X H 43.5 X D 64cm
2 – HITACHI LASER DUST MONITORS, Model TS 6500 S/N 969180 (1996), Model TS1500 S/N 846875, Main Body 460 (W) x 735 (D) x 220 (H)
1 – PLASTIC MOLD PACKAGE DEVICE DECAPSULATOR, Model PA102, S/N 89110112(1990)
1 – DALTON MODEL 490 DRYER, S/N 1311-6-0035-4 (1999), Type: DOC, Efficiency: 70-200° C, Cycles: 50, 200V
2 – THE FUJITA CORP. EM BOARD LACK UNITS
1 – THE FUJITA CORP. EM TESTER, S/N 934-06-020 (1989)
1 – MISONIX MODEL FE-WS6 DOWN FLOW WORK STATION, S/N WS03361104(2005), Approximately 4'W
1 – UENO MODEL 497 WET BENCH, S/N 011003-15-01
2 – OSHITARI MODEL SCOX-1500HY-S OVENS, S/Ns 920547, 930134 (To 1993)
1 – DALTON MODEL 442 DRYER, S/N 1311-6-0035-5 (1999), Type: DOC, 70-200° C,Cycles: 50
1 – KEMITRONICS MODEL E-280 UV ERASER SYSTEM, S/N 204970 (2002)
1 – TOKYO DENKI SANGYO CO. MODEL CV/CC PAE35-10 POWER SUPPLY, S/N 26010246
1 – HAKUTO MODEL 7100 LCA, S/N 907512, Tool #BSKK07
HILCO Industrial is a division of Hilco Global • Headquarters 5 Revere Drive, Ste. 206 • Northbrook, IL 60062 • All rights reserved
Printed in USA • BOS2398 • IL License #444.000215 • Please visit our website at www.hilcoind.com to review our complete terms and conditions.
FollowUs on:
A Hilco Global Company
Vested in Your Success
OVER 35 OFFICES THROUGHOUT NORTH, CENTRAL & SOUTH AMERICA, EUROPE, MIDDLE EAST, ASIA, AUSTRALIA
AVAILABLE IMMEDIATELYHilco® Industrial
By Order of asset locations
ni 49-2, YAcHiMAtAni YAcHiMAtA-SHi, cHiBA 289-1103 JAPAn
1108-1, HiSHidA SHiBAYAMA-MAcHi SABU-gUn, cHiBA 289-1602JAPAn
For more inFormationor inspection, pleasecontactBRiAn Lee +1 [email protected]
RoBeRt LUPARdo +1 [email protected]