Allwin21 Corp and Main Products

220 Cochrane CircleMorgan Hill, CA95037

U.S.A.Tel.:+1-408-778-7788

Fax.:+1-408-904-7168www.allwin21.com

sales@allwin21.com© 2015 Allwin21 Corp. All Rights Reserved. All specification and information here are subject to change without notice and can not be used for purchase and facility plan.

2

Founded in: 2000Location: Silicon Valley, U.S.A.Business Scope: Be dedicated to the following Semiconductor Equipment , Parts and Service:

Rapid Thermal Processing Plasma Asher/Descum Plasma EtchSputter DepositionMetal Film Thickness&Sheet Resistance

Key Features: Exclusive licensed manufacturer of Heatpulse 610Advanced Allwin21 Software PackageFocus on production-proven process equipmentIntegrated solid robotic wafer transfer technologyExperienced local engineer support Products made in U.S.A.

About Allwin21

3

Allwin21 Mission• Rebuild production-proven semiconductor high-tech equipment suitable to

customer preferences and needs.

• Deliver unique, high value-added solutions to our customers, using

Allwin21's proven products that are leveraged by our innovative

technologies.

• Be dedicated to providing III-V materials unique solutions that enable new

processes, improve yield, increase uptime, reduce maintenance costs, and

extend life of capital equipment for new technologies with Compound

Semiconductor.

4

Allwin21 Global Presence Allwin21 Corp

USA

Japan

Korea

HeadquarterSubcompany or officeAgents

Allwin21 CorpNanjing, China

Taiwan

Britain France Germany

Israel India Vietnam

Poland

Brazil Singapore

EastUSA

Russia

5

Customers from 40 Countries

6

Industries and Customer Type

Chip Manufacture

LEDs

Biomedical

MEMS

Nanotechnology

Solar Cell

Compound Industry :GaAs, GaN, GaP, GaInP,InP and SiC (III-V)

Optronics： Planar optical waveguides,LASERs, and VCSELs

35%

5%30%

30%Fabs

Labs

Universities

Institutes

7

Key Features of Allwin21 Main ProductsKey Feature Benefit

Made in U.S.A. Go through a series of rigorous tests which are documented, standardized.

High quality. Easy to cooperate with. Guaranteed rapid start-up, lifecycle reliability, and proven process performance.

• 46,

380

Squa

re F

eet

8

Key Features of Allwin21 Main ProductsKey Feature Benefit

Production-proven Chamber • Rapid start-up, release for production• Not a “Guinea Pig”

AW-105R

AW-1008; AW-2001R

AW-B3000

AW-90XeR

AccuThermo AW RTPs

AccuSputter AW 4450

9

Key Features of Allwin21 Main ProductsKey Feature Benefit

Integrated Solid Robotic Wafer Transfer:

• AW-105R (Asher/Descum)

• AW-90XeR (Etcher)

• AW-1008 (Asher)

• AW-2001R (Etcher)

Much Better Reliability Low Particulates Extremely Low Wafer Breakage III-V material substrate handling 50 um thickness wafer handling Integration of Robot and Controller Increase MTBF, Low MTTR

10

Key Features of Allwin21 Main ProductsKey Feature Benefit

Pentium Class PC Controller with 15” touch screen and Allwin21 advanced Software Package.

① Real time graphics display (GUI), process data acquisition, display and analysis .② Closed-loop process parameters control. ③ Precise parameters profiles tailored to suit specific process requirements. ④ Consistent wafer-to-wafer process cycle repeatability. ⑤ Programmable comprehensive calibration of all subsystems from within the software. This

allows faster, easier calibration, leading to enhanced process results.⑥ Recipe creation. It features a recipe editor to create and edit recipes to fully automate the

processing of wafers inside the process chamber.⑦ Validation of the recipe so improper control sequences will be revealed.⑧ Storage of multiple recipes, process data and calibration files so that process and calibration

results can be maintained and compared over time.⑨ Passwords provide security for the system, recipe editing, diagnostics, calibration and setup

functions.⑩ Simple and easy to use menu screen which allow a process cycle to be easily defined and

executed.⑪ Troubleshooting features which allows engineers and service personnel to activate individual

subassemblies and functions. More I/O, AD/DA “expose”.⑫ DB-25F parallel (printer) port. The computer interfaces to the Allwin21 system with only one

cable: the control interface cable.⑬ The control board inside the machine that translates the computer commands to control the

machine has a watchdog timer. If this board looses communication with the control software, it will shut down all processes and halt the system until communication is restored.

⑭ GEM/SEC II function (Optional).⑮ Advanced Allwin21 EOP function(Optional)

11

Key Features of Allwin21 Main ProductsKey Feature Benefit

Advanced EOP function with SLOPE which is used our advanced algorithm and mathematics filtering (Optional)

Very reliable and stable EOP function. Wafer to Wafer Repeatability, No need many recipes

AW-105R

AW-1008; AW-2001R

AW-B3000

AW-90XeR

12

Key Features of Allwin21 Main ProductsKey Feature Benefit

Software has been using on different models of thousands of equipment for customers from 40 countries all over the world for more than 20 years.

Good Reliability Low cost Low risk Not a “Guinea Pig”

13

Key Features of Allwin21 Main ProductsOther Features/Technologies Benefit

New air cooled RF Generator No Chiller, low cost, reliable

New temperature control technologies Precise control, good repeatability

New Closed-Loop Temperature Control Precise control, good repeatability

Microwave power plasma etcher low damage for III-V applications

Multiple wafer sizes for one equipment Low cost, flexible, easy operation

Lamp Tower function (Optional) Safety, easy operation

Fixed Cassette Stations More Reliable

More gas lines with MFC Low cost, flexible

Wafer center aligner function III-V wafers. Good repeatability

Add pressure measure and control Good uniformity and repeatability

CE Mark if necessary For all fabs/labs

14

Allwin21 Main RTP/RTA/RTO/RTN

Models Type Wafer Load Wafer Size Highest Temperature

AccuThermo AW 410 Desktop Atmospheric

Manual ~ 4” 1250 °C

AccuThermo AW 610*

Desktop Manual ~ 6” 1250 °C

AccuThermo AW 810 Desktop Manual ~8” 1250 °C

AccuThermo AW 820 Stand Alone Manual ~8” 1250 °C

AccuThermo AW 610V Desktop Vacuum

Manual ~ 6” 1050 °C

AccuThermo AW 820V Stand Alone Manual ~ 8” 1250 °C

AW 410 AW610*

AW 810 AW610V

AW 820 AW 820V

* The most popular RTP model all over the world.

15

Allwin21 Main Sputter Deposition

Models Condition Cathodes Shape Wafer Size Wafer Load

AccuSputter AW 4450 New Delta or Circle ~ 8” Manual

Perkin-Elmer 4400 Fully Refurbished and Upgraded by Allwin21

Circle (Up to 4) ~ 6” Manual

Perkin-Elmer 4410 Delta (Up to 3) ~8” Manual

Perkin-Elmer 4450 Delta (Up to 3) ~8” Manual

16

Allwin21 Main Rebuilt Plasma Asher/Descum

Models Plasma Power Wafer Size Wafer Load Process Type

AW-105R* 13.56MHz RF 2”,3”,4”,5”,6” Automatic, Single wafer

AW-1008 2.45GHz Microwave 3”,4”,5”,6” Automatic Single wafer

AW-B3000 13.56MHz RF 2”,3”,4”,5”,6”,8” Manual Barrel, Batch* Mainly for GaAs and III-V Materials.

17

Allwin21 Main Rebuilt Plasma Etcher/RIE

Models Plasma Power Wafer Size Etch Material Process Type

AW- 901eR 13.56Mhz RF 3”,4”,5”6” Poly Si, Nitride Single wafer

AW-903eR 13.56Mhz RF 3”,4”,5”6” Oxide Single wafer

AW-901eR TTW 13.56Mhz RF 3”,4”,5”6” Poly Si, Nitride Single wafer

AW-903e TTW 13.56Mhz RF 3”,4”,5”6” Oxide Single wafer

AW-2001R* 2.45GHz Microwave 3”,4”,5”6” Poly Si, Nitride, Oxide Single wafer

* Microwave Etch for low gate damage.

18

Allwin21 Main Rebuilt Metal Thin Film

Thickness& Sheet Resistance

Models Wafer Size Measurement Range

Awgage-150 2”,3”,4”,5”6” 1m /square to 19,990 /square

Awgage-200 6”, 8” 1m /square to 19,990 /square

19

Allwin21 Upgrade Kits for Asher and Etcher

Matrix 10X /30X Tegal 90Xe Branson/IPC 3000 Heatpulse 210/410/610

Gasonics Aura 3010/L3510 Gasonics 1000/2001 Lam AutoEtch X90 Perkin-Elmer 44XX

• PC controller with new PCBs and SW

• Integrated solid Robotic Wafer Transfer Plug-and-Play(Except Heatpulse RTP)

Same input / output connectors

Same definition of each connector

20

Why Allwin21 Upgrade Kits

①Low cost solution of obsolete components and parts.

②Increase stability of the system.

③Network function (GEM/SECII).

④PC control for data storage .

⑤GUI function

⑥More precise control.

⑦Better repeatability, uniformity.

⑧Easier maintenance, calibration and trouble shooting.

⑨Special Requirement of III-V Materials

21

220 Cochrane Circle

Morgan Hill, CA95037,U.S.A.

Tel.:+1-408-778-7788

Fax.:+1-408-904-7168

www.allwin21.com

sales@allwin21.com

© 2015 Allwin21 Corp. All Rights Reserved. All specification and information here are subject to change without notice and can not be used for purchase and facility plan.

Contact Us