40 years - allwin21 corp-rtp asher etcher sputter thin

Proven Qualified

40 Years

AW-1008 Plasma Stripper Asher Equipment

All specification and information here are subject to change without notice and cannot be used for purchase and facility plan. All legacy equipment trademarks belong to O.E.M.. © 2021 Allwin21 Corp. All Rights Reserved.

Proven Qualified

Giant Fabs/Labs


Proven Qualified

Production24/7

All specification and information here are subject to change without notice and cannot be used for purchase and facility plan. All legacy equipment trademarks belong to O.E.M.. © 2021 Allwin21 Corp. All Rights Reserved.


Originated FromThe Dominant

Plasma Stripper Asherof 4-6” Single Wafer in 80’s,90’s

Proven Qualified


Proven Qualified


Advanced Technologies

3-axis Integrated Solid Robotic

Wafer Transfer




CLTC(Closed Loop Temperature Control)

TC Recipe Drive 1000W Lamps


Industrial Grade Computer with Large Hard Disk Driver



Touch Screen GUI




Special Quartz Tray for Multiple Wafers

•3” & 4”•4” & 6”


• Fixed Cassette Station

• With Sensors (Optional)



Center Aligner Function

• Optional



Modern Electronic Components


Advanced Technologies Allwin21 Software

Process Monitor WTM



Recipe Edit Factory Set Up



Board Test Pressure Calibration


Substrate Capability:

• 4”,5”,6”

• Round

• Multiple wafer sizes without hardware change

Configurations and Typical Processes


Microwave Power:

• 2.45 GHz

• 1000W



Temperature:

• 150-250°C for Descum, No

Control

• 250-350°C Thermocouple with

RTP Control Technologies



Gases:

• 1-4 Gases

• MFC

• Customized. Typical Gases are O2,N2



GEM/SEC II Function:

• Optional



Asher Rate Capability

•~1000 A/min (Descum) •~3.5 um/min(Asher)•Process Dependent•Process Support if necessary.



Uniformity Capability

• <±10-20%

• Process Dependent

• 6” wafer



Advanced Technologies Small Footprint

•Width: 32”

•Depth: 32”

•Height: 64”


Let’s All win in the 21st Century

Email: [email protected]

Plasma Asher, Plasma Descum, Dry Clean, Downstream Asher,Semiconductor Equipment, Used Semiconductor Equipment, Semiconductor Process Equipment, Gasonics Aura 1000, Gasonics Aura 2000, Gasonics Aura 3000, Gasonics L3510, Gasonics Aura 3010AW-1008 Plasma Stripper Asher Equipment

mailto:[email protected]

40 years - allwin21 corp-rtp asher etcher sputter thin

Documents