1RECFA Meeting, Sept. 05

PANalytical

K. Bethke, R. de Vries,

V. Kogan, J. Vasterink,

R. Verbruggen, J. Bethke

P. Kidd, P. Fewster

PAN Sussex Research

RECFA @ NIKHEF Industrial Collaboration: PANalyticalTech-transfer, Applications and new Developments in X-ray Materials Analysis

2RECFA Meeting, Sept. 05RECFA Meeting, Sept. 05 2

Outline

• Background / Company• Medipix Tech-Transfer• First highlights on detector properties• Expectations for XRD applications• New EUREKA project “RELAXD”• Conclusions

(Relevance of collaborations, funding)

3RECFA Meeting, Sept. 05RECFA Meeting, Sept. 05 3

Main Activities

X-ray Diffraction and Fluorescence for X-ray Diffraction and Fluorescence for Science and IndustryScience and Industry

Winning by Sharing Winning by Sharing

know-how and experience know-how and experience

in X-ray diffraction and fluorescencein X-ray diffraction and fluorescence

4RECFA Meeting, Sept. 05RECFA Meeting, Sept. 05 4

Main Activities

• XRF (Industry and Research)– Elemental Analysis (qualitative and quantitative)– Applications: Cement, Petrochemical, Plastics,

Steel, Aluminium, Environmental, Geology– Automation

• XRD (Research and Industry)– Phase Analysis (qualitative and quantitative)– Some applications: Pharmaceuticals, Cement, Minerals– Advanced Materials, Thin Films and Semiconductors,

Nanotech, – Automation

5RECFA Meeting, Sept. 05RECFA Meeting, Sept. 05 5

Product range XRF (Elemental Analysis)

CubiXAxios

MiniMate

MiniPal 2

Venus MagiX FAST

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(First) Collaboration XR F & D

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Key Modules

Acrobat Document

8RECFA Meeting, Sept. 05RECFA Meeting, Sept. 05 8

XRD: X’Pert PRO MRDXRD: X’Pert PRO MRD

• Advanced X-ray analysis for new materials research and development

• For thin films, semiconductors and microstructures,nano-research

9RECFA Meeting, Sept. 05RECFA Meeting, Sept. 05 9

X’Pert PRO MRD XLX’Pert PRO MRD XL

• X-ray analysis for research and process development of advanced materials

• Analysis of wafers up to 300 mm diameter

• Automatic wafer loading

10RECFA Meeting, Sept. 05RECFA Meeting, Sept. 05 10

X’Pert PRO MRD XLX’Pert PRO MRD XL

• X-ray analysis for research and process development of advanced materials

• Analysis of wafers up to 300 mm diameter

• Automatic wafer loading

11RECFA Meeting, Sept. 05RECFA Meeting, Sept. 05 11

X’CeleratorX’Celerator

• The standard in X-ray powder diffraction

• Speed and resolution

• Rapid data collection of complete powder diffractograms

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CSI MIAMICSI MIAMI

• FORENSIC SCIENCE

13RECFA Meeting, Sept. 05RECFA Meeting, Sept. 05 13

Outline

• Background• Medipix Tech-Transfer• First results on detector properties• Expectations for XRD applications• First results of Medipix in XRD• New EUREKA project “RELAXD”• Conclusions

14RECFA Meeting, Sept. 05

PANalytical

K. Bethke, R. de Vries,

V. Kogan, J. Vasterink,

R. Verbruggen, J. Bethke

P. Kidd, P. Fewster

PAN Sussex Research

Acknowledgement

NIKHEF teamJan Visschers

Hans Verkooijen, Ton Boerkamp

CERN teamMichael Campbell

Xavier Llopart

Erik Heijne

CERN ETTMarilena Streit-Bianchi

Beatrice Bressan

Ministry EZ / Netherlands

Leader Medipix group

@ NIKHEF + partnership new RELAXD project

Chip design

Spokesman Medipix coll.

Tech-transfer Office

+combined exhibitions

IEEE/Rome, Salon ParisFunding RELAXD IS 051 010

15RECFA Meeting, Sept. 05RECFA Meeting, Sept. 05 15

PARIS: Salon de la Recherche et l’Innovation

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Medipix Collaboration

- Univ + INFN CagliariUniv + INFN Cagliari

- CEA-LIST SaclayCEA-LIST Saclay

- CERN Genève- CERN Genève- Univ d'Auvergne Univ d'Auvergne

- Univ Erlangen- Univ Erlangen

- ESRF Grenoble- ESRF Grenoble

- Univ Freiburg- Univ Freiburg

- Univ Glasgow- Univ Glasgow

- IFAE Barcelona- IFAE Barcelona

- Mitthoegskolan - Mitthoegskolan

Sundsvall Sundsvall

- MRC-LMB Cambridge - MRC-LMB Cambridge

- Univ + INFN Napoli- Univ + INFN Napoli

- - NIKHEF AmsterdamNIKHEF Amsterdam

- Univ + INFN Pisa- Univ + INFN Pisa

- FZU CAS Prague - FZU CAS Prague - IEAP CTU Prague IEAP CTU Prague - SSL Berkeley SSL Berkeley

Spokespersons: Spokespersons: Michael CAMPBELL CERNMichael CAMPBELL CERNJan VISSCHERS Jan VISSCHERS NIKHEFNIKHEF

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Medipix 2 chip / detector

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Comparison with state-of-art detectors

19-Sep-05 ARAGO Symposium 31

ESRF Synchrotron: CCD vs. Medipix

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First shot: direct beam

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Direct beam

Linear scale Logarithmic scale

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R&D: Medipix collaboration - PANalytical

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Micro–high-resolution wafer mapping

“Static” measurement geometry for wafer screening of CdHgTe diode arrays for thermal imaging cameras

<00l>

<624>

Linear array SiStrip detector

Discrimination on every photon separates very weak scattering from random noise in measurement •Signal peak gets enhanced with counting time•Random residual noise statistically cancels with counting time•Results in an enhanced dynamic range

Signal peak <0.25 photons/s

Background noise after 100 s count time ~0.005 photons/s

Single 100 m sampled region

X-rays

23RECFA Meeting, Sept. 05RECFA Meeting, Sept. 05 23

Still weaker signals; very small residual noise

Signal peak ~0.06 photons/s

Background after 100 s count time <0.001 photons/s

Signal peak ~0.1 photons/s

Background after 100 s count time <0.002 photons/s

Single 50 m sampled region

Single 50 m sampled region

24RECFA Meeting, Sept. 05RECFA Meeting, Sept. 05 24

Outline

• Background• Medipix Tech-Transfer• First results on detector properties• Expectations for XRD applications• First results of Medipix in XRD• New EUREKA project “RELAXD”• Conclusions

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High REsolution Large Area X-ray Detector Fully tiled X-ray imager

need pitch adapterGbit/s serial readoutInnovation Project Funded

RELAXD

26RECFA Meeting, Sept. 05RECFA Meeting, Sept. 05 26

RELAXD Consortium

• CANBERRA Olen, Belgium• IMEC Leuven, Belgium

• NIKHEF Amsterdam, Netherlands

• PANalytical as Penholder: Almelo,

Netherlands

RELAXD Partners

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The Future: Medipix2 tiling

through-via etchingwafer thinning3D stacking

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Cost & Subsidy

– 2690 kE total project ==========================================

– 1138 kE PAN 60% funding => 683 kE EZ– 922 kE NIKHEF => 553 kE EZ

==========================================

– 633 kE CANBERRA ~50% funding => 331 kE IWT– 0 IMEC funded by CAN mainly and also by PAN

==========================================

– Status: • approved in NL, already started since Sept 1st • in the approval phase in Belgium• Jan ‘06 Eureka labelling

Financials / Funding of RELAXD

29RECFA Meeting, Sept. 05RECFA Meeting, Sept. 05 29

Relevance: PAN Detector Center

Medipix 2

CERN

Detector chip production

CMOS process (0.25 m)

Medipix + , ++

Plus spin-offs

0.13 mu, 0.09 mu CMOS

….Super-chip, >RELIABLE<

PANalytical

NIKHEF

CANBERRA

IMEC

PANalytical (+Canberra)

(MCNC)

Large®

areaMeaning of RELAXD

Pixel in

telligence

Various shapes&sizes

30RECFA Meeting, Sept. 05RECFA Meeting, Sept. 05 30

Observations to R & I & G (Research / Industry / Government)

• Relevance of Collaborations R&I – Developments of high degree of

complexity – high-tech products only possible together (good tech-transfer)

– Money reflow into the special research groups

– Spin-off activities improve processes in e.g. yield, stability, and performance of devices (with input from both, R&I)

portunityConclusions

31RECFA Meeting, Sept. 05RECFA Meeting, Sept. 05 31

Observations to R & I & G (Research / Industry / Government)

• Relevance of Funding – Financial means of both, R&(medium

sized) I, are limited– Order of millions for a R&D project

requires involvement of funding– Improve compatitive strength of Europe– Enabling technologies are essential and

contribute to the benefit for the society

portunityConclusions cont.