development of a pvd-based manufacturing process …
TRANSCRIPT
Tobias Hollmer
03.09.2015
DEVELOPMENT OF A PVD-BASED MANUFACTURING PROCESS OF
MONOLITHIC LEU IRRADIATION TARGETS FOR 99MO PRODUCTION
FORSCHUNG-NEUTRONENQUELLE HEINZ MAIER-LEIBNITZ (FRM II)
TECHNISCHE UNIVERSITÄT MÜNCHEN
FRM II AND 99MO PRODUCTION
DEVELOPMENT OF A PVD-BASED MANUFACTURING PROCESS OF
MONOLITHIC LEU IRRADIATION TARGETS FOR 99MO PRODUCTION
FRM II:
Commissioning: 2004
Power: 20 MW
Max. thermal neutron flux: 8 ∙ 1014𝑛
𝑐𝑚2𝑠
Currently: installation of an irradiation facility for 99Mo production
Parallel: research on a next level irradiation target
MONOLITHIC LEU TARGET
High uranium density (HEU → LEU)
Separability of the uranium foil (reduction of HRLW)
31 mm
uranium foil
92 mm
162 mm
outer cladding
interlayer (~10µm)
uranium foil (~130µm)
interlayer (~10µm)
inner cladding
29 mm
26 mm
DEVELOPMENT OF A PVD-BASED MANUFACTURING PROCESS OF
MONOLITHIC LEU IRRADIATION TARGETS FOR 99MO PRODUCTION
PRODUCTION PROCESS
interlayer
coating
uranium
coating
interlayer
coating
inner
tube
insertion
1 2 3 4 5
widening
and
welding
DEVELOPMENT OF A PVD-BASED MANUFACTURING PROCESS OF
MONOLITHIC LEU IRRADIATION TARGETS FOR 99MO PRODUCTION
PHYSICAL VAPOR DEPOSITION
spu
tter ta
rget
𝑬
Ar
e-
T
Ar
e-
e-
T
Ar
Ar+
e-
e-
e-
spu
tter
targ
et
-
excitation
ionization
sputtering
deposition
sub
stra
te
𝑩
DEVELOPMENT OF A PVD-BASED MANUFACTURING PROCESS OF
MONOLITHIC LEU IRRADIATION TARGETS FOR 99MO PRODUCTION
1. Sputter target production
2. Coating
3. Assembly
PROCESS STEPS 1. SPUTTER TARGET PRODUCTION
2. COATING
3. ASSEMBLY
DEVELOPMENT OF A PVD-BASED MANUFACTURING PROCESS OF
MONOLITHIC LEU IRRADIATION TARGETS FOR 99MO PRODUCTION
CASTING
cutting cleaning casting cutting
DEVELOPMENT OF A PVD-BASED MANUFACTURING PROCESS OF
MONOLITHIC LEU IRRADIATION TARGETS FOR 99MO PRODUCTION
1. SPUTTER TARGET PRODUCTION
2. COATING
3. ASSEMBLY
COATING APPARATUS
DEVELOPMENT OF A PVD-BASED MANUFACTURING PROCESS OF
MONOLITHIC LEU IRRADIATION TARGETS FOR 99MO PRODUCTION
1. SPUTTER TARGET PRODUCTION
2. COATING
3. ASSEMBLY
GLOVEBOX SYSTEM
DEVELOPMENT OF A PVD-BASED MANUFACTURING PROCESS OF
MONOLITHIC LEU IRRADIATION TARGETS FOR 99MO PRODUCTION
1. SPUTTER TARGET PRODUCTION
2. COATING
3. ASSEMBLY
PROCESS PARAMETERS
sputter rate
layer quality
adhesion
position SS
gas pressure
magnetic field
electric
power
coil
temperature
interlayer
gas inlet vs.
pumping
coil current
cooling
position SS
homogeneity Movement SS
DEVELOPMENT OF A PVD-BASED MANUFACTURING PROCESS OF
MONOLITHIC LEU IRRADIATION TARGETS FOR 99MO PRODUCTION
1. SPUTTER TARGET PRODUCTION
2. COATING
3. ASSEMBLY
HOMOGENEITY
sputter source
0.06
0.08
0.1
0.12
-50 -40 -30 -20 -10 0 10 20 30 40 50
mm
mm
resulting thickness
distribution 𝐹 𝑧
coating process:
𝐹 𝑧 = 𝐶 𝑓 𝑧, 𝑧𝑆 𝑡 𝑅 𝑡 𝑑𝑡𝑇
0
zS
t
movement: 𝑧𝑆 𝑡
deposition characteristics:
𝑓 𝑧, 𝑧𝑆 𝑡 ,𝑀𝑎𝑡𝑒𝑟𝑖𝑎𝑙 z
sputter rate:
𝑅 𝑃 𝑡 , 𝐼(𝑡),𝑚𝑎𝑡𝑒𝑟𝑖𝑎𝑙
∆m
E
DEVELOPMENT OF A PVD-BASED MANUFACTURING PROCESS OF
MONOLITHIC LEU IRRADIATION TARGETS FOR 99MO PRODUCTION
1. SPUTTER TARGET PRODUCTION
2. COATING
3. ASSEMBLY
High mechanical strength when applying high
substrate temperatures
(coil temperature + sputter power)
Foils easily removable when using interlayers
like graphite or aluminum
LAYER QUALITY AND ADHESION
DEVELOPMENT OF A PVD-BASED MANUFACTURING PROCESS OF
MONOLITHIC LEU IRRADIATION TARGETS FOR 99MO PRODUCTION
1. SPUTTER TARGET PRODUCTION
2. COATING
3. ASSEMBLY
FORMING
Investigation of two different forming techniques:
electromagnetic forming and hydraulic forming
Successful demonstration of forming irradiation targets with sputtered foils
Al
Cu
Al
DEVELOPMENT OF A PVD-BASED MANUFACTURING PROCESS OF
MONOLITHIC LEU IRRADIATION TARGETS FOR 99MO PRODUCTION
1. SPUTTER TARGET PRODUCTION
2. COATING
3. ASSEMBLY
SUMMARY
uranium
ingot
cast
pin
sputtered
uranium layer
assembled
irradiation target
casting coating
form
ing
complete irradiation target
welding
ε ≈ 95% ε ≈ 92%
DEVELOPMENT OF A PVD-BASED MANUFACTURING PROCESS OF
MONOLITHIC LEU IRRADIATION TARGETS FOR 99MO PRODUCTION
1. SPUTTER TARGET PRODUCTION
2. COATING
3. ASSEMBLY
Thank you for your attention!
DEVELOPMENT OF A PVD-BASED MANUFACTURING PROCESS OF
MONOLITHIC LEU IRRADIATION TARGETS FOR 99MO PRODUCTION